Case story database

Search for Successfully Implemented Alternatives

You can use the free text search function to find information in the case story database. Most suitable are: substance name and other substance identifier (EC- and CAS-number). You can refine your search after first entry for sector-, function- and process-categories. The case studies are meant to serve as source of inspiration and ideas for substitution. The alternatives are constantly being developed further. We therefore recommend that you to check in each individual case whether an alternative is suitable for your applications and purposes. If you are aware of any other relevant information that is not mentioned in the current case story, please contact SUBSPORTplus.

In order to utilize information in the best way, please take note of the SUBSPORTplus methodology on case stories!

*For a more precise search, use quotation marks ("example").

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Propylene carbonate and supercritical carbon dioxide as alternative to sulfuric acid and hydrogen peroxide in semiconductors industry

The unreacted photoresist on semi-conductor surface can be cleaned using a mixture of supercritical carbon dioxide and propylene carbonate. This alternative can replace the mixture of corrosive sulphuric acid and hydrogen peroxide which is often used for the operation. Substitution reduces the quantities of materials and wastes and gives very good quality results.

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